Ms. Priya Dwivedi Profile

Priya Dwivedi

Doctoral Candidate at Technische Univ Delft

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Publications (3)

SPIE Journal Paper | 9 April 2019 Open Access

Ptychography as a wavefront sensor for high-numerical aperture extreme ultraviolet lithography: analysis and limitations

Priya Dwivedi, Silvania Pereira, H. Paul Urbach

OE, Vol. 58, Issue 04, 043102, (April 2019) https://doi.org/10.1117/12.10.1117/1.OE.58.4.043102

KEYWORDS: Wavefronts, Extreme ultraviolet, Wavefront sensors, Diffraction, Extreme ultraviolet lithography, Photomasks, Imaging systems, Photons, Error analysis, Optical engineering

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Proceedings Article | 24 May 2018 Presentation + Paper

An alternative method to correct translation positions in ptychography

P. Dwivedi, A. Konijnenberg, S. Pereira, H. P. Urbach

Proceedings Volume 10677, 106772A (2018) https://doi.org/10.1117/12.2306672

KEYWORDS: Diffraction, Coherence imaging, Wavefronts, Phase retrieval, Lenses, Image restoration, Image resolution, Optimization (mathematics), Reconstruction algorithms

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Proceedings Article | 26 June 2017 Paper

New method for probe position correction for Ptychography

P. Dwivedi, A. P. Konijnenberg, S. Pereira, H. Urbach

Proceedings Volume 10329, 103292Y (2017) https://doi.org/10.1117/12.2270165

KEYWORDS: Reconstruction algorithms, Phase retrieval, X-rays, Diffraction, Image restoration, Electron microscopes, Microscopes, X-ray imaging, Electron beams, Error analysis, Fourier transforms, Coherence imaging

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