Hybrid organic-inorganic halide perovskites are the most promising materials for photovoltaic applications and especially low-cost, high-efficiency solar cells. Application these promising materials as absorbing thin films inside solar cells caused rapid increase of the power conversion efficiency even above 20% as well as research explosion. Theoretical and experimental investigations are primarily focused on unique electronic properties of these materials result including high carrier mobility, low carrier recombination rates and tunable spectral absorption range. The application field of hybrid perovskites has quickly expanded in terms of the types of materials by substituting one or more of the organic or inorganic ions in one of the most studied perovskites, to obtain the metal halide perovskites AMX3. However, most of the work focused on optimizing the components of solar cells, namely absorbing range of the material and charges collection form the solar cells structure. In contrast, the influence of the technical factors on the device fabrication has been much less explored. This applies especially to techniques for manufacturing multi-layer structures using high vacuum environment, although undoubtedly these techniques allow obtaining the highest quality tin films. This work contains investigation results of the structural properties of the AMX3 perovskites thin films and their influence on the electrical properties multilayer structure of the solar cells. Organic-inorganic AMX3 halide perovskites containing methylammonium lead iodide (CH3NH3PbI3) thin films are used for experimental investigations.