Dr. Qi Wang
at TEL Technology Ctr America LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 March 2019 Presentation
Proc. SPIE. 10963, Advanced Etch Technology for Nanopatterning VIII
KEYWORDS: Etching, Field effect transistors, Group IV semiconductors, Isotropic etching, Silicon, Gallium arsenide, Nanowires, Semiconductors, Transistors, Standards development

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