Qian Xie
Senior Engineer
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Wafer-level optics, Defect detection, Data modeling, Feature extraction, Machine learning, Optical proximity correction, High volume manufacturing, Semiconducting wafers, Optics manufacturing, Statistical modeling

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Defect detection, Image processing, Error analysis, Inspection, Feature extraction, Image analysis, Scanning electron microscopy, Semiconductor manufacturing, Image classification, Semiconducting wafers, Signal detection, Failure analysis

Proceedings Article | 8 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Lithography, Defect detection, Inspection, Image processing software, Process control, Failure analysis, Data analysis, Defect inspection

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