QianYing Tang
at Univ of California Berkeley
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 March 2009 Paper
Proceedings Volume 7275, 72750J (2009) https://doi.org/10.1117/12.814262
KEYWORDS: Monte Carlo methods, Device simulation, Computer simulations, Transistors, Process modeling, Statistical modeling, Statistical analysis, Error analysis, Performance modeling, Instrument modeling

Proceedings Article | 4 March 2008 Paper
Proceedings Volume 6925, 69250F (2008) https://doi.org/10.1117/12.772882
KEYWORDS: Transistors, Process modeling, Optimization (mathematics), Semiconducting wafers, Diffusion, Instrument modeling, Monte Carlo methods, Computer programming, Lithography, Manufacturing

Proceedings Article | 21 March 2007 Paper
Proceedings Volume 6521, 65210P (2007) https://doi.org/10.1117/12.711794
KEYWORDS: Transistors, Performance modeling, Semiconducting wafers, Monte Carlo methods, Instrument modeling, Statistical modeling, Distance measurement, Computer programming, Device simulation, Capacitance

Proceedings Article | 21 March 2007 Paper
Paul Friedberg, Willy Cheung, George Cheng, Qian Ying Tang, Costas Spanos
Proceedings Volume 6521, 652119 (2007) https://doi.org/10.1117/12.710668
KEYWORDS: Critical dimension metrology, Molybdenum, Manufacturing, Monte Carlo methods, Structural design, Etching, Metrology, Process control, Lithography, Resistance

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