Dr. Qianbo Lu
at Zhejiang Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 12 December 2018
Proc. SPIE. 10848, Micro-Optics and MOEMS
KEYWORDS: Mirrors, Optical design, Sensors, Interferometry, Optical resonators, Microopto electromechanical systems, Modal analysis, Mechanical sensors, Structural sensing, Diffraction gratings

Proceedings Article | 5 November 2018
Proc. SPIE. 10815, Optical Design and Testing VIII
KEYWORDS: Microelectromechanical systems, Packaging, Sensors, Silicon, Interferometry, Thermal effects, Microopto electromechanical systems, Finite element methods, Adhesives, Thermal modeling

Proceedings Article | 25 October 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Diffraction, Sensors, Etching, Silicon, Microopto electromechanical systems, Finite element methods, Semiconducting wafers, Mechanical sensors, Structural sensing, Diffraction gratings

Proceedings Article | 28 August 2016
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Microelectromechanical systems, Modulation, Interferometry, Quantitative analysis, Microopto electromechanical systems, Finite element methods, Performance modeling, Mechanical sensors, Temperature metrology, Diffraction gratings

Proceedings Article | 28 August 2016
Proc. SPIE. 9960, Interferometry XVIII
KEYWORDS: Mirrors, Optical design, Silicon, Interferometry, 3D modeling, Microopto electromechanical systems, Finite element methods, Lanthanum, Mechanical engineering, Mechanical engineering, Mechanical sensors

Proceedings Article | 7 August 2015
Proc. SPIE. 9623, 2015 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
KEYWORDS: Optical components, Microscopes, Defect detection, Glasses, Image processing, Error analysis, Light scattering, CCD cameras, Laser optics, 3D image processing

Showing 5 of 6 publications
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