Dr. Qiang Yi
at Institute of Nuclear Physics and Chemistry
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 September 2015
Proc. SPIE. 9627, Optical Systems Design 2015: Advances in Optical Thin Films V
KEYWORDS: Mirrors, Multilayers, Argon, Sputter deposition, X-rays, Interfaces, Nitrogen, Reflectivity, Extreme ultraviolet, Boron

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