Proc. SPIE. 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
Nondestructive surface inspection technology is getting mature, nevertheless, there is an urgent requirement for method
capable of detection and characterization of the subsurface defects at micron to nanometer scales. In this paper, we
propose a method for the detection and characterization of the subsurface defects based on the depth-segmented
partial-wave microscopic spectroscopy. By combination of optical coherence tomography with partial-wave microscopic
spectroscopy, depth-segmented partial-wave microscopic spectroscopy capable of micro-nano structure detection and
characterization at specific depth range is put forward.