Qijian Wan
Application Engineer at Mentor a Siemens Business
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Statistical analysis, Calibration, Control systems, Scanning electron microscopy, Process control, Semiconductor manufacturing, Process modeling

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Roads, Statistical analysis, Visualization, Databases, Metals, Computer simulations, Photomasks, Optics manufacturing, Standards development

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Optical lithography, Etching, Metals, Silicon, Manufacturing, Design for manufacturing, Optical proximity correction, Resolution enhancement technologies, Chemical mechanical planarization

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Lithography, Databases, Manufacturing, Computer simulations, Design for manufacturing

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Roads, Data modeling, Databases, Silicon, Manufacturing, Neural networks, Machine learning, Semiconducting wafers, Data analysis, Design for manufacturability

Showing 5 of 20 publications
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