We report on the concept design and the theoretical ray trace analysis of the complex solar X-ray and EUV imaging telescope (CSIT) which is composed of a grazing incidence optical system and a normal incidence optical system. The CSIT can image the full sun in the wavelength bands from 0.4 to 6 nm and one EUV wavelength of 19.5nm with the same detector. The CSIT is a compact structure and can satisfy top-level image quality requirements.
We have been developing a debris-free laser plasma light source with a gas-puff target system whose nozzle is driven by a piezoelectric crystal membrane. The gas-puff target system can utilize gases such as CO2, O2 or some gas mixture according to different experiments. Therefore, in comparison with soft X-ray source using a metal target, after continuously several-hour laser interaction with gas from the gas-puff target system, no evidences show that the light source can produce debris. The debris-free soft X-ray source is prepared for soft X-ray projection lithography research at State Key Laboratory of Applied Optics. Strong emission from CO2, O2 and Kr plasma is observed.
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