Dr. Qing Xin Zhang
at A*STAR Institute of Microelectronics
SPIE Involvement:
Publications (9)

Proceedings Article | 19 February 2011
Proc. SPIE. 7942, Optoelectronic Integrated Circuits XIII
KEYWORDS: Photodetectors, Avalanche photodetectors, Waveguides, Germanium, Silicon, Receivers, Modulators, Integrated circuits, Photonic integrated circuits, Silicon photonics

Proceedings Article | 8 February 2008
Proc. SPIE. 6899, Photonics Packaging, Integration, and Interconnects VIII
KEYWORDS: Packaging, Waveguides, Silicon, Semiconductor lasers, Photonics, Optical benches, Waveguide lasers, Tolerancing, Assembly tolerances, Light wave propagation

Proceedings Article | 8 February 2008
Proc. SPIE. 6887, MOEMS and Miniaturized Systems VII
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Mirrors, Interfaces, Silver, Finite element methods, Micromirrors, Semiconducting wafers, Wafer bonding

Proceedings Article | 12 December 2007
Proc. SPIE. 6782, Optoelectronic Materials and Devices II
KEYWORDS: Waveguides, Silicon, Single mode fibers, Fiber lasers, Semiconductor lasers, Optical benches, Fiber couplers, Waveguide lasers, Tolerancing, Assembly tolerances

Proceedings Article | 3 October 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Oxides, Etching, Silicon, Deep reactive ion etching, Plasma enhanced chemical vapor deposition, Optical switching, Reactive ion etching, Semiconducting wafers, Anisotropic etching

Showing 5 of 9 publications
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