Qing Yao
at Univ of Illinois
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Actuators, Silica, Sensors, Metals, Crystals, Silicon, Kinematics, Photomasks, Microfabrication, Semiconducting wafers

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