Qinghua He
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Data modeling, Quartz, Chemical vapor deposition, Numerical integration, Monte Carlo methods, Low pressure chemical vapor deposition, Chemical elements, Semiconducting wafers, Thermal modeling, Temperature metrology

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