The micro-motion stages are widely used in micro/nano manufacturing technology. In this paper, an integrated approach
for measuring micro-displacement of micro-motion stage that incorporates motion estimation algorithm into the
computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed.
Then, a robust multiscale motion estimation algorithm for micro-motion measurement is proposed. Finally, the microdisplacement
of the micro-motion stage based on the piezoelectric ceramic actuators and the compliant mechanisms is
measured using the integrated approach. The maximal bias of the proposed approach reached 13 nm. Experimental
results show that the new integrated method can measure micro-displacement with nanometer accuracy.