Dr. Qingtao Zhang
at Institute of Electrical Engineering
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 January 2006 Paper
Proceedings Volume 6037, 603718 (2006) https://doi.org/10.1117/12.638531
KEYWORDS: Thin films, Etching, Silicon, Silicon films, Thin film devices, Lead, Sol-gels, Wet etching, Electrodes, Platinum

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