Qingwei Liu
at Semiconductor Manufacturing International Corp
SPIE Involvement:
Publications (31)

Proceedings Article | 13 June 2022 Poster
Proceedings Volume 12053, 120531F (2022) https://doi.org/10.1117/12.2615979
KEYWORDS: Signal detection, Overlay metrology, Metrology, Logic, Scanning electron microscopy, Etching, Yield improvement, Optical metrology, Inspection, Front end of line

Proceedings Article | 24 March 2017 Paper
Guanyong Yan, Liang Li, Xiao Chen, Qingwei Liu, Yuanying Tu
Proceedings Volume 10147, 101471J (2017) https://doi.org/10.1117/12.2257922
KEYWORDS: Optical lithography, Photomasks, Lithography, Optical proximity correction, Immersion lithography, Manufacturing, Etching, Visualization, Image processing, Process control, Metals, Semiconducting wafers

Proceedings Article | 16 March 2016 Paper
Linda Zhuang, Jenny Pang, Jessy Xu, MengFeng Tsai, Xue Long Shi, Qing Wei Liu, Ellyn Yang, Yifan Zhang, Jason Sweis, Ya-Chieh Lai, Hua Ding
Proceedings Volume 9781, 97810L (2016) https://doi.org/10.1117/12.2219561
KEYWORDS: New and emerging technologies, Design for manufacturability, Manufacturing, Acquisition tracking and pointing, Structural design, Profiling, Databases, Electronic design automation, Very large scale integration, Image classification, Optical proximity correction

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 97801C (2016) https://doi.org/10.1117/12.2219913
KEYWORDS: Computer programming, Optical proximity correction, Resolution enhancement technologies, Metals, Computational lithography, Model-based design, Photomasks, Optical lithography, Lithography, Semiconducting wafers, Data modeling, Visualization

Proceedings Article | 18 March 2015 Paper
Neal Lafferty, Yuan He, Jinhua Pei, Feng Shao, QingWei Liu, Xuelong Shi
Proceedings Volume 9426, 94260L (2015) https://doi.org/10.1117/12.2087176
KEYWORDS: Source mask optimization, Resolution enhancement technologies, Photomasks, Lithography, Optical proximity correction, Nanoimprint lithography, SRAF, Optical lithography, Photovoltaics, Visualization

Showing 5 of 31 publications
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