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Qingyu Yan
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Publications (1)
Proceedings Article | 10 October 2020 Presentation
Double-beam laser shockwave cleaning of nanoparticles on silicon wafers to eliminate uncleaned blind zone
Lisha Fan, Shuowen Zhang, Qingyu Yan, Jian Lin, Qunli Zhang, Jianhua Yao
Proceedings Volume 11546, 115460H (2020) https://doi.org/10.1117/12.2575298
KEYWORDS: Nanoparticles, Silicon, Semiconductor lasers, Semiconducting wafers, Plasma, Electronic components, Particles, Semiconductors, Laser processing
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