Dr. Qinyuan Deng
at Institute of Optics and Electronics CAS
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 6 February 2019
Proc. SPIE. 10842, 9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Subdiffraction-limited Plasmonic Lithography and Innovative Manufacturing Technology
KEYWORDS: Optical lithography, Microlens, Micromirrors, Photomasks, Digital micromirror devices

Proceedings Article | 23 August 2017
Proc. SPIE. 10373, Applied Optical Metrology II
KEYWORDS: Modulation, Chemistry, Interferometry, Dimensional metrology, Integrated circuits

Proceedings Article | 25 October 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Thin films, Beam splitters, Reflection, Silicon, Reflectivity, Fourier transforms, Interferometry, Reflectometry, Silicon films, Optics manufacturing

Proceedings Article | 25 October 2016
Proc. SPIE. 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
KEYWORDS: Confocal microscopy, Light sources, Modulation, Imaging systems, Interferometry, CCD cameras, Optical interferometry, Microfabrication, Scanning tunneling microscopy, Light

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