A novel technique for the fabrication of micro-structures on Ni-alloy by DPSS laser ablation was studied
and reported in this paper. Using a q-switched Nd:YVO4 laser, a Ni alloy was micro-machined without lithography-based technologies. The effects of various process parameters such as working power, laser frequency, scan speed and number of scan were examined during laser processing. The removal of debris during ablation was also studied, and performed under vacuum conditions. The obtained prototype was tested by optical microscopy, Scanning Electron Microscopy, EDX and 3D microprofilometer. The obtained structured nickel alloy can be used as master for imprinting on glass substrates for lab-on-chip applications.
Micro-channels were fabricated in sodalime glass through imprinting, and then joined to a glass slab by thermal assisted
direct bonding (TADB). These techniques are simple and low cost, suitable for mass production of micro-fluidic devices.
The joined samples were characterized before and after TADB by optical microscopy, profilometer, SEM, shear strength
test and Vickers hardness test. The integrity of channels is maintained also after the TADB. The interface between the
two glass slabs was found to be without impurities, bubbles and cracks. The bonding strength was also measured to be