Dr. Qiying Chen Profile

Dr. Qiying Chen

at National Research Council

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Publications (1)

Proceedings Article | 29 December 2003 Paper

Laser microfabrication of photonic crystal structures on silicon wafers

Qiying Chen, Suwas Nikumb

Proceedings Volume 5347, (2003) https://doi.org/10.1117/12.524569

KEYWORDS: Crystals, Optical spheres, Photonic crystals, Silicon, Semiconducting wafers, Laser crystals, Microfabrication, Semiconductor lasers, Micromachining, Fabrication

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