In this paper we present a novel bimorph deformable mirror composed of double-layer lead magnesium niobate (PMN) slices. Compared with lead zirconate titanate (PZT), PMN has better physical features served as bimorph mirror. The optimization design of the mirror electrodes pattern and mirror size are investigated. The type of conductive adhesive and coating process are proposed. An improved mounting apparatus using O-type rubber rings for flexible mounting the mirror is innovated. Also the control circuit model and the interface unit with computer are investigated and designed. A mature
design proposal and technology of bimorph deformable mirror system is presented.
A novel micromirror array based on PolyMUMPs fabrication process is proposed and explored. The segmented array
described here, consisting of 37 hexagonal mirrors with diameter of 380um, is fabricated by MEMSCAP. A hierarchical
design and optimization of the opto-mechano-electrical structure was carried out, combining finite element analysis
(FEA) performed in Comsol Multiphysics with a system-level macromodelling in Matlab. The micromirror prototype
uses design techniques able to provide a low pull-in voltage (less than 10V with all three electrodes biased and less than
14V with only one biased electrode) and large strokes (about 3um), as revealed from both FEA and system level
simulation. Preliminary experimental test results show that the individual micromirrors can be actuated and orientated in
space by applying voltages on their actuation electrodes. Following the individual micromirror cells tests, the entire array
will be integrated in an adaptive microsystem for wavefront correction.