Dr. Quan Zhang
Staff Engineer I at ASML Brion
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Data modeling, Image processing, Photomasks, Machine learning, Computational lithography, Optical proximity correction, SRAF, Model-based design

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Photomasks, Optical proximity correction, SRAF, Mask making, Process modeling

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