Dr. Quan Zhang
Staff Engineer I at ASML
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 20 September 2020 Presentation
Adam Lyons, Tom Wallow, Kurt Wampler, Vincent Shu, Brian Dillon, Quan Zhang, Dai Tsunoda, Yohei Torigoe, Yasuaki Horima
Proceedings Volume 11518, 115180P (2020) https://doi.org/10.1117/12.2573132
KEYWORDS: Photomasks, Optical proximity correction, Lithography, Device simulation, Semiconducting wafers, Optical simulations

Proceedings Article | 20 March 2018 Presentation + Paper
Shibing Wang, Stanislas Baron, Nishrin Kachwala, Chidam Kallingal, Jing Su, Quan Zhang, Vincent Shu, Jin-Wei Gao, Jung-Hoon Ser, Zero Li, Ahmad Elsaid, Been-Der Chen, Weichun Fong, Dezheng Sun, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Gary Zhang, Yen-Wen Lu, Yu Cao
Proceedings Volume 10587, 105870N (2018) https://doi.org/10.1117/12.2299421
KEYWORDS: SRAF, Machine learning, Optical proximity correction, Photomasks, Lithography, Model-based design, Source mask optimization, Computational lithography, Image processing

Proceedings Article | 16 October 2017 Presentation + Paper
Shuichiro Ohara, Chris Spence, Stanislas Baron, Been-Der Chen, Quan Zhang, Vincent Shu, Yasuko Saito, Masakazu Hamaji, Yasuaki Horima
Proceedings Volume 10451, 1045104 (2017) https://doi.org/10.1117/12.2280470
KEYWORDS: Photomasks, Optical proximity correction, Lithography, SRAF, Mask making, Process modeling

Proceedings Article | 16 October 2017 Presentation + Paper
Jing Su, Quan Zhang, Weichun Fong, Dezheng Sun, Cuiping Zhang, Chenxi Lin, Shibing Wang, Been-Der Chen, Stanislas Baron, Rafael Howell, Stephen Hsu, Larry Luo, Yi Zou, Yen-Wen Lu, Yu Cao
Proceedings Volume 10451, 104510D (2017) https://doi.org/10.1117/12.2283493
KEYWORDS: SRAF, Machine learning, Lithography, Photomasks, Optical proximity correction, Model-based design, Computational lithography, Data modeling, Image processing

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top