Dr. Quanfang Chen Profile

Dr. Quanfang Chen

Assistant Professor at Univ of Central Florida

SPIE Involvement:

Author

Proceedings Article | 13 November 2007 Paper

Mechanical strength of carbon nanotube/nickel nanocomposite

Ying Sun, Quanfang Chen

Proceedings Volume 6423, 64230G (2007) https://doi.org/10.1117/12.779224

KEYWORDS: Nickel, Nanocomposites, Composites, Carbon, Carbon nanotubes, Polymers, Distortion, Scanning electron microscopy, Materials processing, Diffusion

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SPIE Journal Paper | 1 April 2007

Characterization study of bonded and unbonded polydimethylsiloxane aimed for bio-micro-electromechanical systems-related applications

Miao Liu, Quanfang Chen

JM3, Vol. 6, Issue 02, 023008, (April 2007) https://doi.org/10.1117/12.10.1117/1.2731381

KEYWORDS: Interfaces, Diffusion, Microelectromechanical systems, Polymers, Silicon, Lab on a chip, Biological research, Microfluidics, Plasma treatment, Dielectrics

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SPIE Journal Paper | 1 October 2005

Low-stress ultra-thick SU-8 UV photolithography process for MEMS

Bo Li, Miao Liu, Quanfang Chen

JM3, Vol. 4, Issue 04, 043008, (October 2005) https://doi.org/10.1117/12.10.1117/1.2117108

KEYWORDS: Optical lithography, Microelectromechanical systems, Ultraviolet radiation, Silicon, Finite element methods, Semiconducting wafers, Lithium, Scanning electron microscopy, Near ultraviolet, Photomasks

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Proceedings Article | 22 January 2005 Paper

Development of robust self-assembled microvalves for robust hydraulic actuators

Bo Li, Sal Gerace, Quanfang Chen

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.600773

KEYWORDS: Nickel, Actuators, Ferroelectric materials, Silicon, Chemical mechanical planarization, Photoresist materials, Solids, Protactinium, Microelectromechanical systems, Aerospace engineering

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Proceedings Article | 24 January 2004 Paper

Nanocrystalline mesoporous SMO thin films prepared by sol gel process for MEMS-based hydrogen sensor

Jianwei Gong, Weifeng Fei, Sudipta Seal, Quanfang Chen

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524530

KEYWORDS: Thin films, Hydrogen, Sensors, Gas sensors, Platinum, Microelectromechanical systems, Actuators, Source mask optimization, Particles, Photomasks

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Proceedings Article | 24 January 2004 Paper

Low-stressed high-aspect-ratio ultrathick SU-8 UV-LIGA process for the fabrication of a micro heat exchanger

Bo Li, Quanfang Chen

Proceedings Volume 5344, (2004) https://doi.org/10.1117/12.524608

KEYWORDS: Nickel, Coating, Microelectromechanical systems, Semiconducting wafers, Near ultraviolet, Cryogenics, Copper, Silicon, Photoresist materials, Metals

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Proceedings Article | 22 July 2003 Paper

Microvalve for SMA-based CHAD

Dong Gun Lee, Quanfang Chen, Daniel Shin, Gregory Carman

Proceedings Volume 5055, (2003) https://doi.org/10.1117/12.483593

KEYWORDS: Nickel, Shape memory alloys, Silicon, Actuators, Finite element methods, Microelectromechanical systems, Deep reactive ion etching, Etching, Photoresist materials, Failure analysis

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Proceedings Article | 16 January 2003 Paper

Robust microvalves for hydraulic actuators

Quanfang Chen, Bo Li, Jianwei Gong, Min Hu

Proceedings Volume 4981, (2003) https://doi.org/10.1117/12.479560

KEYWORDS: Actuators, Silicon, Nickel, Etching, Semiconducting wafers, Reactive ion etching, Liquids, Shape memory alloys, Finite element methods, Microfabrication

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Proceedings Article | 27 July 1998 Paper

Frequency response of an inchworm motor fabricated with micromachined interlocking surface mesoscale actuator device (MAD)

Quanfang Chen, Da-Jeng Yao, Chang-Jin Kim, Gregory Carman

Proceedings Volume 3329, (1998) https://doi.org/10.1117/12.316946

KEYWORDS: Actuators, Prototyping, Bridges, Crystals, Silicon, Semiconducting wafers, Ferroelectric materials, Control systems, Molecular bridges, Microfabrication

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Showing 5 of 9 publications

Conference Committee Involvement (4)

MEMS/MOEMS Technologies and Applications III

12 November 2007 | Beijing, China

MEMS/MOEMS Components and Their Applications III

23 January 2006 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications II

24 January 2005 | San Jose, California, United States

MEMS/MOEMS Components and Their Applications

26 January 2004 | San Jose, California, United States

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