Quinn J. Leonard
at Univ of Wisconsin
SPIE Involvement:
Publications (9)

Proceedings Article | 21 November 2002 Paper
Ralu Divan, Derrick Mancini, Nicolai Moldovan, Barry Lai, Lahsen Assoufid, Quinn Leonard, Franco Cerrina
Proceedings Volume 4783, (2002) https://doi.org/10.1117/12.451019
KEYWORDS: Gold, Polymethylmethacrylate, Zone plates, X-rays, Hard x-rays, X-ray lithography, Electroplating, Scanning electron microscopy, Plating, Photomasks

Proceedings Article | 21 July 2000 Paper
Proceedings Volume 3997, (2000) https://doi.org/10.1117/12.390044
KEYWORDS: Photomasks, X-ray lithography, Lithography, Diffraction, Printing, X-rays, Photoresist processing, Critical dimension metrology, Standards development, Synchrotrons

Proceedings Article | 25 June 1999 Paper
Olga Vladimirsky, Niru Dandekar, Wenlong Jiang, Quinn Leonard, Klaus Simon, Srinivas Bollepalli, Yuli Vladimirsky, James Taylor
Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351161
KEYWORDS: Photomasks, Lithography, X-ray lithography, Diffraction, X-rays, Opacity, Synchrotrons, Near field diffraction, Photoresist processing, Printing

Proceedings Article | 25 June 1999 Paper
Quinn Leonard, Jaz Bansel, Lei Yang, Olga Vladimirsky, Srinivas Bollepalli, Mumit Khan, Yuli Vladimirsky, Franco Cerrina, James Taylor, Klaus Simon, Lynn Rathbun, Richard Tiberio
Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351147
KEYWORDS: Photomasks, X-rays, Gold, Etching, X-ray lithography, Photoresist materials, Lithography, Silicon, Electron beam lithography, Scanning electron microscopy

Proceedings Article | 7 July 1997 Paper
Klaus Simon, R. Macklin, Robert Selzer, Quinn Leonard, Franco Cerrina
Proceedings Volume 3048, (1997) https://doi.org/10.1117/12.275773
KEYWORDS: Semiconducting wafers, X-ray lithography, Optical alignment, X-rays, Photomasks, Prototyping, Lithography, Overlay metrology, Control systems, Wafer manufacturing

Showing 5 of 9 publications
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