Dr. R. Scott Mackay
Consultant at Petersen Advanced Lithography Inc
SPIE Involvement:
Conference Program Committee | Conference Chair | Conference Co-Chair | Author
Publications (17)

Proceedings Article | 19 May 2006
Proc. SPIE. 6283, Photomask and Next-Generation Lithography Mask Technology XIII
KEYWORDS: Signal to noise ratio, Lithography, Electron beams, Etching, Molecules, Ions, Image resolution, Scanning electron microscopy, Ion beams, Photomasks

Proceedings Article | 9 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Semiconductors, Lithography, Reticles, Optical lithography, Etching, Manufacturing, Inspection, Photomasks, Nanoimprint lithography, Semiconducting wafers

Proceedings Article | 7 November 2005
Proc. SPIE. 5992, 25th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Semiconductors, Lithography, Electron beam lithography, Metrology, Metals, Error analysis, Composites, Manufacturing, Photomasks, Vestigial sideband modulation

Proceedings Article | 18 August 2005
Proc. SPIE. 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II
KEYWORDS: Microelectromechanical systems, Semiconductors, Nanotechnology, Lithography, Reticles, Optical lithography, Etching, Manufacturing, Photomasks, Optics manufacturing

SPIE Conference Volume | 6 May 2005

Proceedings Article | 5 May 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Lithography, Electron beam lithography, Manufacturing, Design for manufacturing, Photomasks, Optical proximity correction, Mask making, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies

Showing 5 of 17 publications
Conference Committee Involvement (9)
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
Alternative Lithographic Technologies
24 February 2009 | San Jose, California, United States
Emerging Lithographic Technologies XII
26 February 2008 | San Jose, California, United States
Emerging Lithographic Technologies XI
27 February 2007 | San Jose, California, United States
Showing 5 of 9 published special sections
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