Roy Koret
Technology Cooperation at Nova Ltd
Publications (23)

Proceedings Article | 27 April 2023 Presentation + Paper
A. Moussa, J. Bogdanowicz, B. Groven, P. Morin, M. Beggiato, M. Saib, G. Santoro, Y. Abramovitz, K. Houtchens, S. Ben Nissim, N. Meir, J. Hung, A. Urbanowicz, R. Koret, I. Turovets, G. Lorusso, A.-L. Charley
Proceedings Volume 12496, 124961X (2023)
KEYWORDS: Semiconducting wafers, Scanning electron microscopy, Monolayers, Scatterometry, 2D materials, Metrology, Atomic force microscopy, Raman spectroscopy, Silicon, Histograms

SPIE Journal Paper | 21 February 2023 Open Access
JM3, Vol. 22, Issue 03, 031203, (February 2023)
KEYWORDS: Metrology, Interferometry, Data modeling, Tunable filters, Semiconducting wafers, Scatterometry, Optical filters, Machine learning, Education and training, Dielectrics

Proceedings Article | 13 June 2022 Poster
Roy Koret, Harold Dekkers, Quentin Smets, Romain Delhougnea, Gouri Sankar Kar, Joey Hung, Vanessa Zhang, Wei Ti Lee, Amiad Conley
Proceedings Volume PC12053, PC1205313 (2022)
KEYWORDS: Silicon, Annealing, X-ray fluorescence spectroscopy, Thin films, Refractive index, Doping, Control systems, Capacitors, Zinc, X-rays

Proceedings Article | 8 June 2022 Presentation + Paper
M. Medikonda, D. Schmidt, M. Rizzolo, M. Breton, A. Dutta, H. Wu, E. Evarts, A. Cepler, R. Koret, I. Turovets, D. Edelstein
Proceedings Volume PC12053, PC120530J (2022)
KEYWORDS: Metrology, Resistance, Critical dimension metrology, Chemical mechanical planarization, Logic, Data modeling, Instrument modeling, Scatterometry, Semiconducting wafers, Machine learning

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 120530S (2022)
KEYWORDS: Metrology, Semiconducting wafers, Scatterometry, Optical filters, Dielectrics, Data modeling, Back end of line, Front end of line, Chemical mechanical planarization, Transmission electron microscopy

Showing 5 of 23 publications
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