Dr. Roy Koret
Application Specialist at Nova Measuring Instruments Ltd
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | September 19, 2018
Proc. SPIE. 10775, 34th European Mask and Lithography Conference
KEYWORDS: Wafer-level optics, Lithography, Metrology, Scatterometry, Machine learning, Maskless lithography, Reflectance spectroscopy, Electron beam direct write lithography, Semiconducting wafers, Inverse optics, Channel projecting optics

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Logic, Etching, Gallium arsenide, Silicon, Heart, Transmission electron microscopy, Scatterometry, Nanowires

PROCEEDINGS ARTICLE | March 31, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Diffractive optical elements, Etching, Germanium, X-ray diffraction, Gallium arsenide, Silicon, Materials processing, Solids, Semiconducting wafers, X-ray fluorescence spectroscopy

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Metrology, Etching, Copper, Dielectrics, 3D modeling, Scatterometry, 3D metrology, Process control, Photomasks, Semiconducting wafers, Back end of line

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Electron beam lithography, Metrology, Optical lithography, Nano opto mechanical systems, Error analysis, Inspection, Scatterometry, Optical metrology, Process control, Cadmium sulfide, Extreme ultraviolet lithography, Maskless lithography, Nanoimprint lithography, Critical dimension metrology, Semiconducting wafers, Scatter measurement

SPIE Journal Paper | December 8, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Critical dimension metrology, Metrology, Semiconducting wafers, Scanning electron microscopy, Electron microscopes, Image analysis, Modulation, Diffractive optical elements, Data modeling

Showing 5 of 8 publications
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