Rafal Rakowski
at Wojskowa Akademia Techniczna
SPIE Involvement:
Publications (24)

Proceedings Article | 18 May 2009 Paper
Proceedings Volume 7361, 73610C (2009) https://doi.org/10.1117/12.820744
KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Grazing incidence, Polymethylmethacrylate, Laser ablation, Mirrors, Scanning electron microscopy, Positron emission tomography, Solids

Proceedings Article | 20 November 2008 Paper
L. Sveda, L. Pina, V. Semencova, A. Inneman, A. Bartnik, H. Fiedorowicz, R. Rakowski
Proceedings Volume 7141, 71410P (2008) https://doi.org/10.1117/12.822370
KEYWORDS: Mirrors, Silver, Molybdenum, Manufacturing, Extreme ultraviolet, Lithographic illumination, Sensors, Plasma, Optics manufacturing, Lithography

Proceedings Article | 20 November 2008 Paper
Proceedings Volume 7141, 714105 (2008) https://doi.org/10.1117/12.822350
KEYWORDS: Extreme ultraviolet, Plasma, Mirrors, Polymers, Grazing incidence, Xenon, Micromachining, X-rays, Argon, Laser applications

Proceedings Article | 17 September 2007 Paper
Proceedings Volume 6703, 67030C (2007) https://doi.org/10.1117/12.735588
KEYWORDS: Extreme ultraviolet, Polymers, Plasma, Mirrors, Laser ablation, Photons, Multilayers, Coating, Nanoprocess, Ultraviolet radiation

Proceedings Article | 26 April 2007 Paper
Proceedings Volume 6346, 63461H (2007) https://doi.org/10.1117/12.738157
KEYWORDS: Extreme ultraviolet, Plasma, Polymers, Polymethylmethacrylate, Pulsed laser operation, Xenon, X-rays, Nanoprocess, Nd:YAG lasers, Gas lasers

Showing 5 of 24 publications
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