Prof. Rainer J. Fasching Profile

Prof. Rainer J. Fasching

Professor at Stanford Univ

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Author

Publications (5)

Proceedings Article | 23 January 2006 Paper

Nanofabrication of electrochemical planar probes for single cell analysis

R. J. Fasching, S.-J. Bai, T. Fabian, F. B. Prinz

Proceedings Volume 6109, 610902 (2006) https://doi.org/10.1117/12.648950

KEYWORDS: Electrodes, Silicon, Metals, Semiconducting wafers, Atomic force microscopy, Platinum, Biological research, Fabrication, Scanning electron microscopy, Wet etching

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Proceedings Article | 29 July 2004 Paper

Ultrasharp high-aspect-ratio probe array for SECM and AFM Analysis

Ye Tao, Rainer Fasching, Fritz Prinz

Proceedings Volume 5389, (2004) https://doi.org/10.1117/12.547655

KEYWORDS: Silicon, Electrodes, Etching, Metals, Platinum, Photomasks, Oxides, Semiconducting wafers, Plasma etching, Chromium

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Proceedings Article | 30 December 2003 Paper

Fabrication of an electrochemical tip-probe system embedded in SiNx cantilevers for simultaneous SECM and AFM analysis

Rainer Fasching, Yao Tao, Fritz Prinz

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524452

KEYWORDS: Silicon, Etching, Electrodes, Metals, Platinum, Atomic force microscopy, Photomasks, Oxides, Semiconducting wafers, Optical lithography

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Proceedings Article | 24 April 2003 Paper

High-density multilayer connection technology for MEMS and CMOS applications

Seoung Jai Bai, Rainer Fasching, Fritz Prinz

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499135

KEYWORDS: Semiconducting wafers, Silicon, Microelectromechanical systems, CMOS technology, Resistance, Chemical mechanical planarization, Polishing, Etching, Low pressure chemical vapor deposition, Doping

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Proceedings Article | 24 April 2003 Paper

Pencil probe system for electrochemical analysis and modification in nanometer dimensions

Rainer Fasching, Ye Tao, Kyle Hammerick, Fritz Prinz

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499065

KEYWORDS: Electrodes, Silicon, Etching, Oxides, Platinum, Metals, Transducers, Semiconducting wafers, Isotropic etching, Oxidation

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