Prof. Rainer J. Fasching
Professor at Stanford Univ
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | January 23, 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Fabrication, Electrodes, Metals, Silicon, Platinum, Atomic force microscopy, Scanning electron microscopy, Wet etching, Biological research, Semiconducting wafers

PROCEEDINGS ARTICLE | July 29, 2004
Proc. SPIE. 5389, Smart Structures and Materials 2004: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Oxides, Etching, Electrodes, Metals, Silicon, Chromium, Platinum, Photomasks, Plasma etching, Semiconducting wafers

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Oxides, Optical lithography, Etching, Electrodes, Metals, Silicon, Platinum, Atomic force microscopy, Photomasks, Semiconducting wafers

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Microelectromechanical systems, Polishing, Etching, Silicon, Resistance, Doping, Low pressure chemical vapor deposition, CMOS technology, Semiconducting wafers, Chemical mechanical planarization

PROCEEDINGS ARTICLE | April 24, 2003
Proc. SPIE. 5116, Smart Sensors, Actuators, and MEMS
KEYWORDS: Oxides, Etching, Electrodes, Metals, Silicon, Platinum, Transducers, Semiconducting wafers, Isotropic etching, Oxidation

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