Dr. Rainer Köning
Research at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Author
Publications (14)

SPIE Journal Paper | May 22, 2014
OE Vol. 53 Issue 12
KEYWORDS: Interferometers, Zerodur, Computer programming, Photomasks, Calibration, Metrology, Mirrors, Manufacturing, Microscopes

PROCEEDINGS ARTICLE | May 13, 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Microscopes, Diffraction, Metrology, Imaging systems, Calibration, Optical testing, Objectives, Photomasks, Geometrical optics, Edge roughness

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Microscopes, Mirrors, Interferometers, Sensors, Calibration, Error analysis, Computer programming, Head, Virtual reality, Environmental sensing

PROCEEDINGS ARTICLE | January 12, 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

PROCEEDINGS ARTICLE | October 17, 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Microscopes, Mirrors, Beam splitters, Metrology, Interferometers, Sensors, Calibration, Computer programming, Image registration, Photomasks

PROCEEDINGS ARTICLE | April 5, 2007
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Reflectors, Microscopes, Optical microscopes, Mirrors, Metrology, Interferometers, Sensors, Calibration, Computer programming, Optical alignment

Showing 5 of 14 publications
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