Mr. Rainer Paetzel Profile

Rainer Paetzel

Marketing Director at Coherent LaserSystems GmbH & Co. KG

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Author

Publications (33)

Proceedings Article | 2 March 2020 Presentation + Paper

Superior microstructures for advanced package integration

R. Delmdahl, R. Pätzel, J. Brune, D. Müller

Proceedings Volume 11268, 1126813 (2020) https://doi.org/10.1117/12.2549510

KEYWORDS: Laser ablation, Excimer lasers, Polymers, Oscillators, Packaging, Laser drilling, Microscopes, Polymer thin films

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Proceedings Article | 14 March 2016 Paper

Laser applications in advanced chip packaging

Dirk Müller, Andrew Held, Rainer Pätzel, Dave Clark, Joris van Nunen

Proceedings Volume 9735, 973508 (2016) https://doi.org/10.1117/12.2213180

KEYWORDS: Carbon dioxide, Carbon dioxide lasers, Laser applications, Packaging, Laser drilling, Excimer lasers, Excimers, Ultraviolet radiation, Mobile devices, Manufacturing, Gas lasers, Laser processing, Pulsed laser operation

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Proceedings Article | 8 February 2012 Paper

Average power scaling of UV excimer lasers drives flat panel display and lidar applications

Ludolf Herbst, Ralph Delmdahl, Rainer Paetzel

Proceedings Volume 8238, 82380A (2012) https://doi.org/10.1117/12.906687

KEYWORDS: Excimer lasers, Ultraviolet radiation, LIDAR, Laser applications, Raman spectroscopy, Annealing, Flat panel displays, Backscatter, Amorphous silicon, High power lasers

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Proceedings Article | 22 February 2011 Paper

Novel 1.2kW UV laser system for micro fabrication and annealing

Ludolf Herbst, Rainer Paetzel, Kai Schmidt

Proceedings Volume 7920, 79200Z (2011) https://doi.org/10.1117/12.874977

KEYWORDS: Excimer lasers, Ultraviolet radiation, Manufacturing, Oscillators, Laser systems engineering, Annealing, Laser development, High power lasers, Pulsed laser operation, Solid state lasers

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Proceedings Article | 21 February 2008 Paper

Recent developments in UV laser micromachining

R. Delmdahl, Rainer Pätzel

Proceedings Volume 6874, 68740K (2008) https://doi.org/10.1117/12.781962

KEYWORDS: Excimer lasers, Laser ablation, Pulsed laser operation, Nd:YAG lasers, Ultraviolet radiation, Laser development, Thin films, Laser stabilization, Laser energy, Thermal effects

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Proceedings Article | 1 March 2006 Paper

Laser annealing of LTPS

Rainer Paetzel, Ludolf Herbst, Frank Simon

Proceedings Volume 6106, 61060A (2006) https://doi.org/10.1117/12.659082

KEYWORDS: Crystals, Excimer lasers, Annealing, Amorphous silicon, Glasses, Laser sintering, Laser crystals, LCDs, Diode pumped solid state lasers, Silicon films

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Proceedings Article | 1 March 2006 Paper

High power excimer laser micromachining

Ludolf Herbst, Rainer Paetzel

Proceedings Volume 6106, 610606 (2006) https://doi.org/10.1117/12.655221

KEYWORDS: Excimer lasers, Micromachining, Ultraviolet radiation, Optical lithography, Excimers, Manufacturing, High power lasers, Laser ablation, Photomasks, Laser systems engineering

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Proceedings Article | 28 May 2004 Paper

Sub-0.25-pm 50-W amplified excimer laser system for 193-nm lithography

Sergei Govorkov, Alexander Wiessner, Gongxue Hua, Timur Misuryaev, Andrey Knysh, Stefan Spratte, Peter Lokai, Tamas Nagy, Igor Bragin, Andreas Targsdorf, Thomas Schroeder, Hans-Stephan Albrecht, Rainer Desor, Thomas Schmidt, Rainer Paetzel

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.536374

KEYWORDS: Oscillators, Optical amplifiers, Excimer lasers, Laser systems engineering, Lithography, Molybdenum, Amplifiers, Optical lithography, Optics manufacturing, Pulsed laser operation

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Proceedings Article | 26 June 2003 Paper

Excimer lasers for superhigh NA 193-nm lithography

Rainer Paetzel, Hans Albrecht, Peter Lokai, Wolfgang Zschocke, Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485344

KEYWORDS: Laser stabilization, Laser optics, Excimer lasers, Optical lithography, Pulsed laser operation, Signal detection, Calibration, Oscillators, Optical components, Laser development

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Proceedings Article | 26 June 2003 Paper

High-power excimer lasers for 157-nm lithography

Stefan Spratte, Frank Voss, Igor Bragin, Elko Bergmann, Norbert Niemoeller, Tamas Nagy, Ulrich Rebhan, Andreas Targsdorf, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 5040, (2003) https://doi.org/10.1117/12.485345

KEYWORDS: Lithography, Pulsed laser operation, Laser stabilization, High power lasers, Reliability, Laser development, Excimer lasers, Laser resonators, Optical lithography, Laser optics

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Proceedings Article | 30 July 2002 Paper

High-repetition-rate excimer lasers for 193-nm lithography

Wolfgang Zschocke, Hans Stephen Albrecht, Thomas Schroeder, Igor Bragin, Peter Lokai, Farid Seddighi, Christian Reusch, Anna Cortona, Kai Schmidt, Rainer Paetzel, Klaus Vogler

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474561

KEYWORDS: Laser development, Laser stabilization, Pulsed laser operation, 193nm lithography, Lithography, Excimer lasers, Semiconducting wafers, Laser scanners, 3D scanning, Optical design

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Proceedings Article | 30 July 2002 Paper

High-power high-repetition-rate F2 lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Stefan Spratte, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474614

KEYWORDS: Lithography, Laser stabilization, Prototyping, Pulsed laser operation, Vacuum ultraviolet, High power lasers, Laser development, Spatial coherence, Laser metrology, Polarization

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Proceedings Article | 14 September 2001 Paper

High-power 193-nm excimer lasers for DUV lithography

Rainer Paetzel, Klaus Vogler, Hans Stephen Albrecht, Thomas Schroeder, Igor Bragin, Juergen Kleinschmidt, Wolfgang Zschocke

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435755

KEYWORDS: Laser stabilization, Excimer lasers, Lithography, Pulsed laser operation, Laser scanners, 3D scanning, Lenses, High power lasers, Laser energy, Laser development

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Proceedings Article | 14 September 2001 Paper

Advanced F2-lasers for 157-nm lithography

Klaus Vogler, Ingo Klaft, Frank Voss, Igor Bragin, Elko Bergmann, Tamas Nagy, Norbert Niemoeller, Rainer Paetzel, Sergei Govorkov, Gongxue Hua

Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435652

KEYWORDS: Calibration, Lithography, Laser stabilization, Spectroscopy, Vacuum ultraviolet, Pulsed laser operation, Laser metrology, Laser scanners, 3D scanning, Gas lasers

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Proceedings Article | 5 July 2000 Paper

Prospects for very high repetition rate lasers for microlithography

Igor Bragin, Vadim Berger, Rainer Paetzel, Uwe Stamm, Andreas Targsdorf, Juergen Kleinschmidt, Dirk Basting

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389003

KEYWORDS: Pulsed laser operation, Laser stabilization, Lithography, Pulsed power, Optical lithography, Deep ultraviolet, Electrodes, Excimer lasers, Gas lasers, Laser development

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Proceedings Article | 5 July 2000 Paper

Advanced F2 lasers for microlithography

Klaus Vogler, Uwe Stamm, Igor Bragin, Frank Voss, Sergei Govorkov, Gongxue Hua, Juergen Kleinschmidt, Rainer Paetzel

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388991

KEYWORDS: Lithography, Laser stabilization, Sensors, Calibration, Metrology, Power meters, Pulsed laser operation, Laser resonators, Optical lithography, Laser metrology

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Proceedings Article | 5 July 2000 Paper

Ultranarrow-bandwidth excimer lasers for 248-nm DUV lithography

Rainer Paetzel, Hans Stephen Albrecht, Vadim Berger, Igor Bragin, Matthias Kramer, Juergen Kleinschmidt, Marcus Serwazi

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388985

KEYWORDS: Excimer lasers, Laser resonators, Laser stabilization, Resonators, Deep ultraviolet, Polarization, Lithography, Laser scanners, 3D scanning, Laser development

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Proceedings Article | 5 July 2000 Paper

High-repetition-rate ultranarrow-bandwidth 193-nm excimer lasers for DUV lithography

Uwe Stamm, Rainer Paetzel, Igor Bragin, Juergen Kleinschmidt, Peter Lokai, Rustem Osmanov, Thomas Schroeder, Martin Sprenger, Wolfgang Zschocke

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388976

KEYWORDS: Excimer lasers, Lithography, Calibration, Pulsed laser operation, Laser development, Spectroscopy, Laser stabilization, Laser scanners, 3D scanning, Scanners

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Proceedings Article | 3 September 1999 Paper

New dimensions of micromachining with 157-nm laser light

Michael Kauf, Heinrich Endert, John Fair, Rainer Paetzel, Michael Scaggs, Dirk Basting

Proceedings Volume 3875, (1999) https://doi.org/10.1117/12.360464

KEYWORDS: Laser applications, Micromachining, Excimer lasers, Lithography, Optical lithography, Deep ultraviolet, Laser development, Silica, Fluorine, Pulsed laser operation

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Proceedings Article | 26 July 1999 Paper

High-repetition-rate excimer lasers for DUV lithography

Uwe Stamm, Rainer Paetzel, Igor Bragin, Vincent Berger, Ingo Klaft, Juergen Kleinschmidt, Rustem Osmanov, Thomas Schroeder, Klaus Vogler, Wolfgang Zschocke, Dirk Basting

Proceedings Volume 3679, (1999) https://doi.org/10.1117/12.354310

KEYWORDS: Excimer lasers, Lithography, Laser stabilization, Deep ultraviolet, Semiconducting wafers, Combined lens-mirror systems, Optical lithography, Reliability, Pulsed laser operation, Laser resonators

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Proceedings Article | 25 June 1999 Paper

Excimer laser for 157-nm lithography

Uwe Stamm, Igor Bragin, Sergei Govorkov, Juergen Kleinschmidt, Rainer Paetzel, Evgueni Slobodtchikov, Klaus Vogler, Frank Vofl, Dirk Basting

Proceedings Volume 3676, (1999) https://doi.org/10.1117/12.351152

KEYWORDS: Excimer lasers, Lithography, Laser resonators, Laser stabilization, Optical lithography, Deep ultraviolet, Laser applications, Vacuum ultraviolet, Resonators, Optical design

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Proceedings Article | 29 June 1998 Paper

ArF excimer laser for 193-nm lithography

Uwe Stamm, Rainer Paetzel, Juergen Kleinschmidt, Klaus Vogler, Wolfgang Zschocke, Igor Bragin, Dirk Basting

Proceedings Volume 3334, (1998) https://doi.org/10.1117/12.310730

KEYWORDS: Excimer lasers, Lithography, Laser stabilization, Pulsed laser operation, Silica, Optical lithography, Laser applications, Laser development, Laser resonators, Laser scanners

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Proceedings Article | 7 July 1997 Paper

ArF excimer laser for 193-nm lithography

Uwe Stamm, Juergen Kleinschmidt, Peter Heist, Igor Bragin, Rainer Paetzel, Dirk Basting

Proceedings Volume 3051, (1997) https://doi.org/10.1117/12.276007

KEYWORDS: Excimer lasers, Lithography, Laser development, Light sources, Optical lithography, Scanners, Combined lens-mirror systems, Imaging systems, High power lasers, Laser stabilization

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Proceedings Article | 4 April 1997 Paper

Recent developments in industrial excimer laser technology

Uwe Stamm, Rainer Paetzel, Igor Bragin, Juergen Kleinschmidt, Frank Voss, Dirk Basting

Proceedings Volume 3092, (1997) https://doi.org/10.1117/12.270114

KEYWORDS: Laser applications, Excimer lasers, Laser stabilization, Lithography, High power lasers, Fluorine, Laser marking, Micromachining, Laser development, Resonators

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Proceedings Article | 31 March 1997 Paper

Excimer lasers for material ablation cross the 1.5 kHz mark

Rainer Paetzel, Uwe Stamm, Igor Bragin, Frank Voss, Bernard Nikolaus, Heinrich Endert, Dirk Basting

Proceedings Volume 2992, (1997) https://doi.org/10.1117/12.270082

KEYWORDS: Excimer lasers, Pulsed laser operation, Laser applications, Laser ablation, Solid state lasers, Switches, Solid state electronics, Magnetism, Laser development, Micromachining

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Proceedings Article | 27 March 1997 Paper

Excimer lasers in manufacturing

Heinrich Endert, Rainer Paetzel, Uwe Stamm, Dirk Basting

Proceedings Volume 2993, (1997) https://doi.org/10.1117/12.270013

KEYWORDS: Excimer lasers, Optics manufacturing, Laser applications, Manufacturing, UV optics, Ultraviolet radiation, Laser development, Pulsed laser operation, Laser resonators, Annealing

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Proceedings Article | 7 June 1996 Paper

Extremely narrow-bandwidth high-repetition-rate laser for high-NA step-and-scan tools

Juergen Kleinschmidt, Rainer Paetzel, Peter Heist, Uwe Stamm, Dirk Basting, Michael Powell

Proceedings Volume 2726, (1996) https://doi.org/10.1117/12.240944

KEYWORDS: Resonators, Fabry–Perot interferometers, Excimer lasers, Laser resonators, Mirrors, Beam splitters, Deep ultraviolet, Oscillators, Polarization, Optical components

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Proceedings Article | 8 April 1996 Paper

Excimer laser: innovation in industrial material processing

Dirk Basting, Heinrich Endert, Rainer Paetzel, Bernard Nikolaus

Proceedings Volume 2703, (1996) https://doi.org/10.1117/12.237721

KEYWORDS: Excimer lasers, Halogens, Ultraviolet radiation, Laser development, Excimers, Gas lasers, Micromachining, Plasma, Materials processing, Laser applications

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Proceedings Article | 26 May 1995 Paper

KrF excimer laser with repetition rates of 1 kHz for DUV lithography

Rainer Paetzel, Juergen Kleinschmidt, Ulrich Rebhan, Jim Franklin, Heinrich Endert

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209305

KEYWORDS: Excimer lasers, Halogens, Laser development, Fluorine, Lithography, Pulsed laser operation, Resonators, Deep ultraviolet, Laser stabilization, Laser applications

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Proceedings Article | 31 March 1995 Paper

NovaTube: first excimer laser design for quasi-sealed-off operation

Ulrich Rebhan, Bernard Nikolaus, Frank Voss, Dirk Basting, Rainer Paetzel

Proceedings Volume 2502, (1995) https://doi.org/10.1117/12.204949

KEYWORDS: Excimer lasers, Halogens, Laser development, Laser applications, Ultraviolet radiation, Fluorine, Gas lasers, Contamination, Cryogenics, Ceramics

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Proceedings Article | 16 August 1994 Paper

NovaTubeTM: a breakthrough toward sealed-off excimer lasers

Bernard Nikolaus, Ulrich Rebhan, Rainer Paetzel, Frank Voss, Dirk Basting

Proceedings Volume 2206, (1994) https://doi.org/10.1117/12.184633

KEYWORDS: Excimer lasers, Pulsed laser operation, Gas lasers, Cryogenics, Electrodes, Laser development, Laser applications, Halogens, Laser stabilization, Metals

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Proceedings Article | 17 May 1994 Paper

High-repetition-rate lasers for advanced DUV exposure tools

Ulrich Rebhan, Rainer Paetzel, Hermann Buecher, Michael Powell

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175483

KEYWORDS: Polarization, Resonators, Pulsed laser operation, Laser resonators, Deep ultraviolet, Electrodes, Reflectivity, Light sources, Laser applications, Excimer lasers

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Proceedings Article | 8 August 1993 Paper

KrF excimer lasers for DUV-lithography

Rainer Paetzel, Hermann Buecher, Ulrich Rebhan

Proceedings Volume 1927, (1993) https://doi.org/10.1117/12.150468

KEYWORDS: Reliability, Optical lithography, Excimer lasers, Laser stabilization, Pulsed laser operation, Lenses, High power lasers, Deep ultraviolet, System integration, Laser applications

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Showing 5 of 33 publications

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