Rainer Paetzel
Marketing Director at Coherent LaserSystems GmbH & Co. KG
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 14 March 2016
Proc. SPIE. 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI
KEYWORDS: Packaging, Mobile devices, Carbon dioxide, Ultraviolet radiation, Laser processing, Manufacturing, Laser applications, Laser drilling, Carbon dioxide lasers, Gas lasers, Excimer lasers, Excimers, Pulsed laser operation

Proceedings Article | 8 February 2012
Proc. SPIE. 8238, High Energy/Average Power Lasers and Intense Beam Applications VI; Atmospheric and Oceanic Propagation of Electromagnetic Waves VI
KEYWORDS: Amorphous silicon, Backscatter, LIDAR, Ultraviolet radiation, Annealing, High power lasers, Laser applications, Raman spectroscopy, Excimer lasers, Flat panel displays

Proceedings Article | 22 February 2011
Proc. SPIE. 7920, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI
KEYWORDS: Oscillators, Ultraviolet radiation, Annealing, High power lasers, Manufacturing, Laser development, Solid state lasers, Excimer lasers, Pulsed laser operation, Laser systems engineering

Proceedings Article | 21 February 2008
Proc. SPIE. 6874, High Energy/Average Power Lasers and Intense Beam Applications II
KEYWORDS: Thin films, Ultraviolet radiation, Laser energy, Laser development, Nd:YAG lasers, Laser ablation, Thermal effects, Laser stabilization, Excimer lasers, Pulsed laser operation

Proceedings Article | 1 March 2006
Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V
KEYWORDS: Amorphous silicon, Glasses, Annealing, Crystals, Silicon films, LCDs, Excimer lasers, Laser crystals, Laser sintering, Diode pumped solid state lasers

Proceedings Article | 1 March 2006
Proc. SPIE. 6106, Photon Processing in Microelectronics and Photonics V
KEYWORDS: Optical lithography, Ultraviolet radiation, High power lasers, Manufacturing, Laser ablation, Photomasks, Excimer lasers, Micromachining, Excimers, Laser systems engineering

Showing 5 of 32 publications
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