Mr. Rainer L. Pelzer Profile

Rainer L. Pelzer

Technical Management at EV Group

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Publications (3)

PROCEEDINGS ARTICLE | January 23, 2006

Optical module fabrication using nanoimprint technology

Proc. SPIE. 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV

KEYWORDS: Wafer-level optics, Nanotechnology, Optical components, Lithography, Ultraviolet radiation, Telecommunications, Nanoimprint lithography, Optical alignment, Semiconducting wafers, Nanolithography

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PROCEEDINGS ARTICLE | February 23, 2005

Nanoimprint lithography: full wafer replication of nanometer features

Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II

KEYWORDS: Lithography, Polymethylmethacrylate, Polymers, Glasses, Ultraviolet radiation, Silicon, Microelectronics, Nanoimprint lithography, Optical alignment, Semiconducting wafers

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PROCEEDINGS ARTICLE | May 20, 2004

Nanostructuring of polymers by hot embossing lithography

Proc. SPIE. 5374, Emerging Lithographic Technologies VIII

KEYWORDS: Nanotechnology, Lithography, Visible radiation, Nanostructuring, Polymers, Glasses, Manufacturing, Scanning electron microscopy, Nanoimprint lithography, Optical alignment

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