Prof. Rainer Tutsch
at Technische Univ Braunschweig
SPIE Involvement:
Conference Program Committee | Conference Co-Chair | Conference Chair | Symposium Committee | Author
Publications (28)

PROCEEDINGS ARTICLE | May 5, 2012
Proc. SPIE. 8430, Optical Micro- and Nanometrology IV
KEYWORDS: Gold, Confocal microscopy, Refractive index, Optical sensors, Silica, Interferometers, Silicon, Optical testing, Photoresist materials, Aluminum

SPIE Journal Paper | October 1, 2011
OE Vol. 50 Issue 10
KEYWORDS: Cameras, 3D metrology, Sensors, Imaging systems, Binary data, Mirrors, Projection systems, Raster graphics, Illumination engineering, Photogrammetry

PROCEEDINGS ARTICLE | May 27, 2011
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Microlens array, Sensors, Silicon, Wavefront sensors, Microlens, Charge-coupled devices, Optical alignment, CCD image sensors, Semiconducting wafers, Signal detection

PROCEEDINGS ARTICLE | May 14, 2010
Proc. SPIE. 7726, Optical Sensing and Detection
KEYWORDS: Modulation, Imaging systems, Cameras, Calibration, Electrodes, Glasses, Molecules, Manufacturing, LCDs, Projection systems

PROCEEDINGS ARTICLE | June 17, 2009
Proc. SPIE. 7390, Modeling Aspects in Optical Metrology II
KEYWORDS: Microscopes, Mirrors, Interferometers, Sensors, Calibration, Error analysis, Computer programming, Head, Virtual reality, Environmental sensing

PROCEEDINGS ARTICLE | May 27, 2009
Proc. SPIE. 7470, 25th European Mask and Lithography Conference
KEYWORDS: Electron beams, Metrology, Scattering, Sensors, 3D modeling, Scanning electron microscopy, Monte Carlo methods, Photomasks, Optical simulations, Semiconducting wafers

Showing 5 of 28 publications
Conference Committee Involvement (23)
Optical Measurement Systems for Industrial Inspection X
26 June 2017 | Munich, Germany
Optical Measurement Systems for Industrial Inspection IX
22 June 2015 | Munich, Germany
Interferometry XVII: Advanced Applications
19 August 2014 | San Diego, California, United States
Dimensional Optical Metrology and Inspection for Practical Applications III
5 May 2014 | Baltimore, Maryland, United States
Dimensional Optical Metrology and Inspection for Practical Applications II
25 August 2013 | San Diego, California, United States
Showing 5 of 23 published special sections
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