Dr. Ralf U. Dudde Profile

Dr. Ralf U. Dudde

at Fraunhofer-ISIT

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Proceedings Article | 25 August 1997 Paper

Flexible data registration and automation in semiconductor production

Ralf Dudde, Peter Staudt-Fischbach, Benedict Kraemer

Proceedings Volume 3213, (1997) https://doi.org/10.1117/12.284635

KEYWORDS: Semiconductors, Semiconducting wafers, Control systems, Data modeling, Databases, Telecommunications, Computing systems, Interfaces, Human-machine interfaces, Silicon

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The need for cost reduction and flexibility in semiconductor production will result in a wider application of computer based automation systems. With the setup of a new and advanced CMOS semiconductor line in the Fraunhofer Institute for Silicon Technology [ISIT, Itzehoe (D)] a new line information system (LIS) was introduced based on an advanced model for the underlying data structure. This data model was implemented into an ORACLE-RDBMS. A cellworks based system (JOSIS) was used for the integration of the production equipment, communication and automated database bookings and information retrievals. During the ramp up of the production line this new system is used for the fab control. The data model and the cellworks based system integration is explained. This system enables an on-line overview of the work in progress in the fab, lot order history and equipment status and history. Based on this figures improved production and cost monitoring and optimization is possible. First examples of the information gained by this system are presented. The modular set-up of the LIS system will allow easy data exchange with additional software tools like scheduler, different fab control systems like PROMIS and accounting systems like SAP. Modifications necessary for the integration of PROMIS are described.

Proceedings Article | 19 September 1995 Paper

Automation in semiconductor production minienvironments, flexibility and information flow

Ralf Dudde, Peter Staudt-Fischbach, Olaf Herzog

Proceedings Volume 2637, (1995) https://doi.org/10.1117/12.221312

KEYWORDS: Semiconducting wafers, Semiconductors, Silicon, CMOS technology, Software development, Databases, Robots, Data modeling, Environmental sensing, Control systems

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The productivity of semiconductor fabs can be improved significantly by the combined action of several measures: Usage of expensive resources only at the point of use, like limiting the generation of a particlefree clean room environment to the immediate surrounding of wafers and wafer processed by usage of mini-environments and SMIF-wafer capsulation. Improvement of the logistic and material flow by an appropriate computer control system in the production line especially for a flexible IC- production. With its new Institute of Silicon Technology (ISiT) in Itzehoe the Fraunhofer-Society for applied research is now realizing an advanced CMOS pilot-line starting with a 0.5 (mu) process that is dedicated from the very beginning for an optimum in flexibility, productivity and lowest running costs. The complete concept for mini- environments, SMIF upgrade of the equipment and production control software was developed in a cooperation between the Fraunhofer institutes for Silicon Technology (ISiT) and Production automation (IPA). The Jenoptic, Jena, was chosen as supplier of SMIF components, mini-environments and identification software. The Line-Information- System, which operates as a low-cost manufacturing execution system, has been developed by the Fraunhofer-IPA using a central database system and client applications to access it. It tracks the actual work in progress in the fab, maintains equipment and lot history and allows production and cost monitoring and optimization.

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