Dr. Ralf D. Geckeler
at Physikalisch-Technische Bundesanstalt
SPIE Involvement:
Conference Program Committee | Author
Publications (28)

Proceedings Article | 2 October 2019
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, X-ray optics, Metrology, Sensors, Calibration, Error analysis, X-rays, Autocollimators, Profilometers, Precision calibration

Proceedings Article | 9 September 2019
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Reflectors, Mirrors, Metrology, Interferometers, Sensors, Calibration, Interferometry, Autocollimators

Proceedings Article | 9 September 2019
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Mirrors, Beam splitters, Reticles, Metrology, Calibration, CCD cameras, Autocollimators, Distance measurement, Objectives, Charge-coupled devices

Proceedings Article | 17 September 2018
Proc. SPIE. 10760, Advances in X-Ray/EUV Optics and Components XIII
KEYWORDS: Mirrors, X-ray optics, Metrology, Sensors, Calibration, X-rays, Gaussian filters, Autocollimators

Proceedings Article | 7 September 2017
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Mirrors, Metrology, Calibration, Autocollimators, Optical encoders, Position sensors, Prototyping, Positioning equipment, Precision calibration

Showing 5 of 28 publications
Conference Committee Involvement (10)
Advances in Metrology for X-Ray and EUV Optics IX
23 August 2020 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VIII
11 August 2019 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VII
6 August 2017 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics VI
29 August 2016 | San Diego, California, United States
Advances in Metrology for X-Ray and EUV Optics V
18 August 2014 | San Diego, California, United States
Showing 5 of 10 Conference Committees
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