Dr. Ralph Nyffenegger
at KLA Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 22 August 2001
Proc. SPIE. 4344, Metrology, Inspection, and Process Control for Microlithography XV
KEYWORDS: Oxides, Metrology, Statistical analysis, Calibration, Chemical species, Error analysis, Silicon, Atomic force microscopy, Atomic force microscope, Standards development

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