Raluca F. Popescu
Retired at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 13, 2012
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Scanners, Image acquisition, Computer simulations, Near field, Finite element methods, Photomasks, Semiconducting wafers, Stanford Linear Collider, Fiber optic illuminators

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