Dr. Raluca Tiron
Senior Scientist at CEA-LETI
SPIE Involvement:
Author
Publications (67)

Proceedings Article | 9 April 2024 Poster + Paper
Diana Fernandez Rodas, Jérôme Rêche, Raluca Tiron, Ivanie Mendes
Proceedings Volume 12956, 129560L (2024) https://doi.org/10.1117/12.3009978
KEYWORDS: Nanoimprint lithography, Manufacturing, Atomic force microscopy, Electron beam lithography, Deformation, Shrinkage, Semiconducting wafers, Scanning electron microscopy, Photoresist processing, Standards development, Grayscale lithography

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12956, 129560K (2024) https://doi.org/10.1117/12.3009898
KEYWORDS: Fabrication, 3D microstructuring, Silicon, Deformation, Bending stress, Tin, Microlens, Titanium, Atomic force microscopy

Proceedings Article | 5 October 2023 Paper
Proceedings Volume 12802, 1280209 (2023) https://doi.org/10.1117/12.2675586
KEYWORDS: Semiconducting wafers, Distortion, Scanning electron microscopy, Metrology, Image processing, Contour extraction, Optical lithography, Lithography, Data modeling, Critical dimension metrology

Proceedings Article | 3 October 2023 Presentation + Paper
Diana Fernandez Rodas, Jérôme Rêche, Raluca Tiron
Proceedings Volume 12653, 126530F (2023) https://doi.org/10.1117/12.2676111
KEYWORDS: Advanced patterning, Electron beam lithography, Grayscale lithography, Material characterization, Manufacturing, Nanoimprint lithography, Scanning electron microscopy, Adhesion, Ultraviolet radiation, Deformation, Silicon, Interfaces, Atomic force microscopy, Shrinkage

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12498, 1249818 (2023) https://doi.org/10.1117/12.2658423
KEYWORDS: Semiconducting wafers, Silicon, Deep ultraviolet, Lithography, Photoacid generators, Photoresist processing, Plasma etching, Etching, Optical lithography, Film thickness, Sustainability

Showing 5 of 67 publications
Conference Committee Involvement (8)
Advances in Patterning Materials and Processes XL
27 February 2023 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIX
25 April 2022 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Showing 5 of 8 Conference Committees
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