Dr. Raluca Tiron
Senior Scientist at CEA-LETI
SPIE Involvement:
Conference Program Committee | Author
Publications (56)

Proceedings Article | 3 April 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Metrology, Optical lithography, Etching, Photomasks, Directed self assembly, Immersion lithography, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 27 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Lithography, Nanostructures, Silica, Etching, Silicon, Atomic force microscopy, Adsorption, Photomasks, Semiconducting wafers, HF etching

Proceedings Article | 25 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Edge detection, Statistical analysis, Polymethylmethacrylate, Ultraviolet radiation, Software development, Polymerization, Line width roughness, Directed self assembly, Binary data

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Annealing, Materials processing, Control systems, Oxygen, Directed self assembly, Oxidation

Proceedings Article | 16 August 2019 Presentation
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Lithography, Optical lithography, Silica, Etching, Silicon, Photomasks, HF etching, Nanolithography, Plasma, New and emerging technologies

Showing 5 of 56 publications
Conference Committee Involvement (6)
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
Advances in Patterning Materials and Processes XXXVII
24 February 2020 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXVI
25 February 2019 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXV
27 February 2018 | San Jose, California, United States
Advances in Patterning Materials and Processes XXXIV
28 February 2017 | San Jose, California, United States
Showing 5 of 6 Conference Committees
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