Dr. Ramakrishnan Ganesan
Postdoctoral Researcher at KAIST
SPIE Involvement:
Publications (5)

Proceedings Article | 2 May 2008 Paper
Proceedings Volume 6792, 67920Z (2008) https://doi.org/10.1117/12.798785
KEYWORDS: Silicon, Polymers, Etching, Plasma etching, Plasma, Image processing, Oxygen, Reactive ion etching, Photoresist processing, Line edge roughness

Proceedings Article | 12 April 2007 Paper
Jin-Baek Kim, Ramakrishnan Ganesan, So Young Yoo, Jae-Hak Choi, Sang Yup Lee
Proceedings Volume 6519, 65191L (2007) https://doi.org/10.1117/12.712102
KEYWORDS: Ultraviolet radiation, Optical lithography, Lithography, Polymers, Chemistry, Proteins, Photoresist processing, Glasses, Photoresist materials, Tissue engineering

Proceedings Article | 2 April 2007 Paper
Ramakrishnan Ganesan, Sumin Kim, Seul Ki Youn, Youngook Cho, Jei-Moon Yun, Jin-Baek Kim
Proceedings Volume 6519, 65192J (2007) https://doi.org/10.1117/12.712113
KEYWORDS: Polymers, Lithography, Resistance, Ultraviolet radiation, Deep ultraviolet, Etching, Printing, Absorbance, Lamps, Diffusion

Proceedings Article | 29 March 2006 Paper
Proceedings Volume 6153, 61532G (2006) https://doi.org/10.1117/12.660111
KEYWORDS: Epoxies, Silicon, Semiconducting wafers, Lithography, Photoresist materials, Etching, Scanning electron microscopy, Near ultraviolet, Cesium, Chemistry

Proceedings Article | 4 May 2005 Paper
Proceedings Volume 5753, (2005) https://doi.org/10.1117/12.599622
KEYWORDS: Lithography, Silicon, Ultraviolet radiation, Absorbance, Standards development, Polymers, Semiconducting wafers, Sodium, Photomicroscopy, Solids

  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top