Dr. Ramana Murthy Badam
at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 7, 2007
Proc. SPIE. 6462, Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
KEYWORDS: Microfluidics, Etching, Dielectrics, Silicon, Photomasks, Biological research, Microfabrication, Reactive ion etching, Semiconducting wafers, High aspect ratio silicon micromachining

PROCEEDINGS ARTICLE | December 20, 2004
Proc. SPIE. 5577, Photonics North 2004: Optical Components and Devices
KEYWORDS: Amorphous silicon, Lithography, Reticles, Optical lithography, Deep ultraviolet, Etching, Silicon, Photonic crystals, Scanning electron microscopy, Photomasks

PROCEEDINGS ARTICLE | December 20, 2004
Proc. SPIE. 5577, Photonics North 2004: Optical Components and Devices
KEYWORDS: Clocks, Waveguides, Cladding, Etching, Silicon, Structured optical fibers, Single mode fibers, Wave propagation, Photonic integrated circuits, Fiber couplers

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