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Ramil Minnigazimov
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Publications (1)
Proceedings Article | 26 June 2017 Paper
Method of measuring linear displacements of objects based on Fresnel diffraction pattern position
Proceedings Volume 10334, 103340L (2017) https://doi.org/10.1117/12.2270103
KEYWORDS: Error analysis, Measurement devices, Precision measurement, Accuracy assessment, Instrumentation control, Wavefront sensors, Objectives, Photodetectors, Sensors, Diffraction, Near field diffraction, Wavefronts, Tolerancing
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