Randy Thilmany
Sales Account Director at Brooks Automation Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 May 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Lithography, Light sources, Manufacturing, Design for manufacturing, Transistors, Field effect transistors, Optical proximity correction, Critical dimension metrology, Process modeling, Device simulation

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