Dr. Ranganathan Nagarajan
Senior Research Engineer at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 November 2002 Paper
Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.476090
KEYWORDS: Photoresist processing, Etching, Plasma etching, Metals, Photoresist materials, Ions, Plasma, Reactive ion etching, Microelectromechanical systems, Gold

Proceedings Article | 28 August 1998 Paper
Proceedings Volume 3510, (1998) https://doi.org/10.1117/12.324373
KEYWORDS: Reliability, Integrated circuits, Oxides, Failure analysis, Detection and tracking algorithms, Manufacturing, Computer simulations, Microelectronics, Tolerancing, Statistical analysis

Proceedings Article | 1 March 1992 Paper
Sanjay Nichani, N. Ranganathan
Proceedings Volume 1708, (1992) https://doi.org/10.1117/12.58568
KEYWORDS: Clocks, Very large scale integration, Convolution, Prototyping, Logic, Image processing, Evolutionary algorithms, Artificial intelligence, Machine vision, Photomasks

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