Dr. Ranganathan Nagarajan
Senior Research Engineer at Institute of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 November 2002 Paper
Proc. SPIE. 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
KEYWORDS: Microelectromechanical systems, Gold, Etching, Metals, Ions, Photoresist materials, Plasma etching, Reactive ion etching, Photoresist processing, Plasma

Proceedings Article | 28 August 1998 Paper
Proc. SPIE. 3510, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV
KEYWORDS: Oxides, Statistical analysis, Detection and tracking algorithms, Manufacturing, Reliability, Computer simulations, Microelectronics, Integrated circuits, Tolerancing, Failure analysis

Proceedings Article | 1 March 1992 Paper
Proc. SPIE. 1708, Applications of Artificial Intelligence X: Machine Vision and Robotics
KEYWORDS: Logic, Clocks, Image processing, Machine vision, Very large scale integration, Photomasks, Artificial intelligence, Convolution, Prototyping, Evolutionary algorithms

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