Dr. Rani S. Ghaida
at
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Photovoltaics, Optical lithography, Data modeling, Very large scale integration, Photomasks, Image classification, Optical proximity correction, SRAF, Model-based design, Library classification systems

SPIE Journal Paper | August 19, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Overlay metrology, Semiconducting wafers, Photomasks, Optical alignment, Transistors, Lithography, Manufacturing, Double patterning technology, Systems modeling, Scanners

PROCEEDINGS ARTICLE | April 18, 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Lithography, Scanners, Process control, Photomasks, Dysprosium, Optical alignment, Semiconducting wafers, Ferroelectric LCDs, Systems modeling, Overlay metrology

PROCEEDINGS ARTICLE | March 15, 2012
Proc. SPIE. 8327, Design for Manufacturability through Design-Process Integration VI
KEYWORDS: Semiconductors, Optical lithography, Metals, Manufacturing, Photomasks, Extreme ultraviolet, Double patterning technology, Chlorine, Electrical engineering, Algorithm development

PROCEEDINGS ARTICLE | May 19, 2011
Proc. SPIE. 8081, Photomask and Next-Generation Lithography Mask Technology XVIII
KEYWORDS: Lithography, Reticles, Image processing, Inspection, Design for manufacturing, Photomasks, Double patterning technology, Line edge roughness, Algorithm development, Device simulation

PROCEEDINGS ARTICLE | September 23, 2009
Proc. SPIE. 7488, Photomask Technology 2009
KEYWORDS: Lithography, Reticles, Optical lithography, Etching, Scanners, Manufacturing, Photomasks, Double patterning technology, Optical alignment, Overlay metrology

Showing 5 of 7 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top