Dr. Ranju D. Venables
Technical Program Manager at Intel Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 15, 2007
Proc. SPIE. 6517, Emerging Lithographic Technologies XI
KEYWORDS: Optical design, Polishing, Glasses, Nickel, Coating, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Ruthenium, Surface finishing

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