Dr. Rao Varanasi
Director of Lithography at Pall Corp
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Author
Publications (49)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Lithography, Particles, Ions, Silicon, Scanning electron microscopy, Aluminum, Plasma etching, Semiconducting wafers

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Particles, Inspection, Bridges, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Defect inspection

Proceedings Article | 27 March 2017 Paper
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Semiconductors, Lithography, Contamination, Defect detection, Metals, Particles, Photoresist materials, Semiconducting wafers, Wafer testing, Contamination control

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Semiconductors, Lithography, Metals, Ions, Silicon, Photoresist materials, Head, Adsorption, Semiconductor manufacturing, Sodium, Thin film coatings, Semiconducting wafers, Particle contamination, Chromatography, Ion exchange

Proceedings Article | 8 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Metrology, Microfluidics, Optical lithography, Contamination, Nanoparticles, Particles, Particle filters, Dendrimers, Semiconducting wafers, Testing and analysis, Yield improvement, Contamination control, Neptunium

Showing 5 of 49 publications
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